Quorum TurboQ ES: High Vacuum (Turbo) Coating System for High-Resolution SEM

Why is TurboQ ES the Top Choice for Modern Laboratories?

Unlike standard systems using rotary pumps, the TurboQ ES elevates sample processing to a higher level thanks to its High Vacuum system:

Ultra-Clean Vacuum: The integrated Turbo pump completely eliminates the risk of oil contamination, ensuring the highest purity of the coating layer.
Powerful Multi-Tasking: Flexible switching between metal sputtering and carbon fiber evaporation within minutes.
Optimized for FE-SEM: Produces ultra-thin, fine, grain-free coatings, enabling clear observation at ultra-high magnifications.
Intelligent Operation: Fully automated vacuum and coating sequences via an intuitive resistive touchscreen.

Turbomolecular Pumping System (70 L/s): Rapidly achieves deep vacuum levels, protecting both the target and the specimen from oxidation.
Magnetron Sputtering Head: Efficiently utilizes noble metal targets (Oxidising & Non-oxidising metals) such as Cr (Chromium), Ir (Iridium), and Pt (Platinum).
Safe & Reliable: Borosilicate glass chamber design with an implosion guard and high-voltage safety interlock system.

Technical Features	TurboQ ES Product Details
Vacuum System	Internal Turbomolecular pump (70 L/s)
Operating Modes	Sputter Coating & Carbon Fiber Evaporation
Ultimate Vacuum	10⁻⁵ mbar range (Ultra-clean)
Supported Targets	Au, Pt, Cr, Ir, W, Pd, Ag (Ø 57mm)
Backing Pump (Required)	5m³/hr Rotary Vane Pump (e.g., Pfeiffer Duo 6)
Control System	Color touchscreen, programmable recipes
Dimensions (WxDxH)	450 x 500 x 435 mm
Weight	26 kg (excluding external pump)

The TurboQ ES system is an indispensable tool in Nano-research centers and advanced materials science:

Chromium or Iridium coating for Field Emission Scanning Electron Microscopy (FE-SEM).
High-quality carbon film deposition for quantitative EDX/EELS analysis.
Sample preparation for applications requiring maximum surface purity.