Quorum Q300T ES: High vacuum Sputter & Carbon Coater for large samples

Optimal Solution for Large Samples and FE-SEM

Combining a Turbomolecular pump with a large-volume sample chamber, the Q300T ES meets the most stringent standards in both research and industrial production:

• Large Area Coating Capability: The specialized chamber design allows for uniform coating of 6-inch or 8-inch Wafers, ensuring precise thickness across the entire surface.

• Ultra-Clean High Vacuum: The integrated Turbo pump system creates a deep vacuum environment (High Vacuum), eliminating contaminants—crucial for high-resolution FE-SEM systems.

• Versatile and Flexible: Supports both metal sputtering heads and carbon fiber evaporation heads, easily interchangeable depending on the application.

• Precise Film Thickness Control: Optional Film Thickness Monitor (FTM) allows for coating control down to the nanometer scale.

Outstanding Technical Features

• 300mm Sample Chamber: Spacious workspace suitable for large sample batches or industrial components.

• Uniform Coating: The variable-speed Rotating Stage ensures that the metal or carbon layer is evenly coated on all surfaces and angles.

• Multi-Material Support: Excellent for coating difficult metals such as Chromium (Cr), Iridium (Ir), and Platinum (Pt), in addition to traditional metals like Gold (Au).

• Modern User Interface: Large touchscreen with extensive recipe storage to standardize laboratory workflows.

Technical Specifications

Typical Applications

• Semiconductor Manufacturing: Coating conductive layers on Wafers for SEM defect inspection.

• Materials Research: Sample preparation for advanced surface analysis requiring high purity.

• Component Manufacturing: Thin-film coating for optical and electronic components.

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