NS-3500 3D Confocal Laser Scanning Microscope (CLSM): Precision Nanometer Measurement Solution

Overview of NS-3500 Technology
Key Features and Advantages
Technical Specifications
Industrial Applications
Frequently Asked Questions (FAQ)
Related Video / Webinar
Contact & Support

Overview of NS-3500 Technology

The NS-3500 represents a breakthrough in optical metrology. It utilizes the Confocal principle, the most reliable non-contact inspection method available today. Unlike conventional microscopes, the NS-3500 provides sharp 3D images by filtering out-of-focus light, making it ideal for challenging samples like glass, thin films, and semiconductor wafers.

Key Features and Advantages

High-Resolution 3D Metrology: Accurate, non-destructive measurement of micro-structures.
Real-time Confocal Imaging: Instant visual feedback with rapid focusing capabilities.
Surface Roughness Analysis: Automated measurement of optical roughness parameters (ISO compliant).
Dual Observation Mode: Simultaneous viewing of 2D microscopic images and 3D confocal data.
Auto Tilt Correction: Advanced algorithms to compensate for sample misalignment.
Large Area Stitching (NSMosaic): Automatically scan and combine multiple high-magnification images into a single wide-field 3D map.
Zero Sample Preparation: No coating or vacuum required, saving time compared to SEM or AFM.

Technical Specifications

Feature	Specification
Laser Source	Laser Diode (Standard 405nm)
Z-axis Resolution	Display resolution up to 1nm
Scanning System	High-speed Galvano Scanner
Stage Type	Motorized XY Stage (Options: 50mm, 100mm, 150mm)
Objective Lenses	5x to 100x (High NA Confocal Objectives)
Software Suite	NSWorks (Operation), NSViewer (Analysis), NSMosaic (Stitching)

Industrial Applications

Semiconductor: IC pattern measurement, Bump height, Wire loop inspection, and CMP process analysis.
FPD (Flat Panel Display): Touch panel inspection, ITO pattern measurement, and LCD column spacer height.
MEMS Devices: 3D profiling of micro-electro-mechanical systems and surface roughness inspection.
Materials Science: Tool surface inspection, crack analysis, and solar cell texture measurement.

Frequently Asked Questions (FAQ)

Can the NS-3500 measure transparent materials?

Yes. The confocal optical system effectively filters internal reflections, allowing precise 3D reconstruction of glass, polymers, and transparent films.
How does NS-3500 differ from an AFM?

While AFM uses a physical probe (contact), the NS-3500 uses a Laser (non-contact). This allows for much faster scanning speeds and eliminates the risk of damaging sensitive samples.
Is sample coating required?

No. Unlike SEM, the NS-3500 does not require gold coating or a vacuum environment. You can measure samples in their natural state.